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Details about the presentation of our paper:
Monday, November 7, 2016
1:00 PM
Session Sample Preparation and Device Deprocessing (Meeting Room 108)
CF4-free Microwave Induced Plasma Decapsulation of Automotive Semiconductor Devices
Dr. Jiaqi Tang JIACO Instruments B.V.
Mr. G. B. Anderson, Infineon Technologies, Livonia, MI
Ms. Jing Wang, JIACO Instruments B.V., Delft, Netherlands
Johannes Bruckmeier, Infineon Technologies Munich, Neubiberg, Germany
Ms. Claudia Keller, Infineon Technologies Munich, Neubiberg, Germany
Genny V. Dela Cruz, Infineon Technologies Singapore, Kallang Sector, Singapore
Prof. Dr. Kees Beenakker, Delft University of Technology, Delft, Netherlands